Sensors, Actuators, and MEMS

This course introduces fabrication and design fundamentals for on-chip sensor and actuator systems having micron-scale dimensions. Basic principles covered include microstructure fabrication, silicon and thin-film materials mechanics, electrostatic force, capacitive motion detection, fluidic damping, piezoelectricity, piezo resistivity, and thermal micromechanics. Applications covered include pressure sensors, micro mirror displays, accelerometers, and gas micro sensors.