Micro and Nano Systems Fabrication
This course introduces students to the process flow and design methodology for integrated systems fabrication. The course highlights the basic unit processes of micro and nano systems fabrication: deposition, paderning, and etching. Students are exposed to examples from: Semiconductor device fabrication; MicroElectroMechanical systems (MEMS) fabrication; MagneTc device fabrication, and optical device fabrication. Labs allow the students to design, fabricate and test an integrated device.
Identify, formulate, and solve complex engineering problems by
applying engineering fundamentals, basic science and mathematics.Develop and conduct appropriate experimentation and/or simulation,
analyze and interpret data, assess and evaluate findings, and use
statistical analyses and objective engineering judgment to draw
conclusions.Practice research techniques and methods of investigation as an
inherent part of learning.Acquire and apply new knowledge; and practice self, lifelong and
other learning strategies.Assess and evaluate the characteristics, performance, cost benefit
analysis failure of components, systems’ reliability and processes to
solve engineering problems, often based on limited and possibly
contradicting information