MEMS/NEMS Technology and Devices
This course introduces MEMS/NEMS fabrication technologies and sensor transduction mechanisms used in micro/nano systems.
Fabrication Techniques: Covers microscale and nanoscale manufacturing processes.
Transduction Mechanisms: Explores piezoelectric, pyroelectric, thermoelectric, thermionic, and piezoresistive principles.
Sensor Applications: Focuses on infrared, radiation, motion, acceleration, flow, pressure, and force sensors.
Data Analysis: Introduces experimental data processing techniques for MEMS/NEMS applications.
Students develop a strong foundation in microsystem design, fabrication, and sensor integration for advanced engineering applications.
G1: Translate mechatronics systems and robots into mathematical models and simulations.
G2: Critically evaluate robotic systems in comparison with state-of-the-art robotic research.
G4: Develop, test, and integrate robotics hardware and software into fully functional systems.
G5: Design, develop, and interface Embedded Systems, ensuring efficient coding and integration.